Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and ...
(MENAFN- JCN NewsWire) Hitachi High-Tech Launches Dark Field Wafer Defect Inspection System DI4600 to Provide High Throughput and High-Precision Defect Detection on Patterned Wafers TOKYO, Dec 6, 2023 ...
MILPITAS, Calif., July 8, 2019 /PRNewswire/ -- Today KLA Corporation (NASDAQ: KLAC) announced the 392x and 295x optical defect inspection systems and the eDR7380™ e-beam defect review system. The new ...
MILPITAS, Calif., July 20, 2020 /PRNewswire/ -- Today KLA Corporation (NASDAQ: KLAC) announced the revolutionary eSL10™ e-beam patterned-wafer defect inspection system. The new system is designed to ...
Reducing defects on the wafer edge, bevel, and backside is becoming essential as the complexity of developing leading-edge chips continue to increase, and where a single flaw can have costly ...
TOKYO, Dec 6, 2023 - (JCN Newswire) - Hitachi High-Tech Corporation announced today the launch of the Hitachi Dark Field Wafer Defect Inspection System DI4600 - a new tool for inspecting particles and ...